Guo, Ran https://orcid.org/0000-0002-2438-8164
Qi, Liping https://orcid.org/0000-0002-3109-2353
Xu, Liang
Liu, Lingpeng
Sun, Lei https://orcid.org/0000-0001-8742-0742
Yin, Zhifu
Li, Kehong
Zou, Helin https://orcid.org/0000-0002-9327-2579
Funding for this research was provided by:
National Natural Science Foundation of China (51705198)
Article Title: Fabrication of 2D silicon nano-mold by side etch lift-off method
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-12-23
Date Accepted: 2021-04-06
Online publication date: 2021-04-20