Nam, Ki-Bong
Yeo, Jin-Ho
Hu, Qicheng
Kim, Mun Ja
Oh, Byungdu https://orcid.org/0000-0002-2709-3177
Yoo, Ji-Beom https://orcid.org/0000-0002-3074-6685
Article Title: Fabrication of extreme ultraviolet lithography pellicle with nanometer-thick graphite film by sublimation of camphor supporting layer
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-05-26
Date Accepted: 2021-08-02
Online publication date: 2021-08-23