Wei, Lei https://orcid.org/0000-0001-7285-7589
Wei, Jiangtao
Kuai, Xuebao
You, Zhiwei
Zhang, Mingliang
Liu, Wen
Yang, Fuhua
Wang, Xiaodong
Funding for this research was provided by:
the National Key Research and Development Program of China (No. 2018YFF01012705)
the Scientific Instrument Developing Project of the Chinese Academy of Sciences (No. YJKYYQ20200002)
the Strategic Priority Research Program of Chinese Academy of Sciences (No. XDB43020500)
Article Title: Optimization and Fabrication of MEMS suspended structures for nanoscale thermoelectric devices
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-12-23
Date Accepted: 2022-04-12
Online publication date: 2022-05-17