Goodwin, Melissa J https://orcid.org/0000-0002-2803-9789
Harteveld, Cornelis A M https://orcid.org/0000-0002-6108-7985
de Boer, Meint J
Vos, Willem L https://orcid.org/0000-0003-3066-859X
Funding for this research was provided by:
NWO (P15-36)
Article Title: Deep reactive ion etching of cylindrical nanopores in silicon for photonic crystals
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-11-04
Date Accepted: 2023-01-25
Online publication date: 2023-03-16