Ji, You Jin
Kim, Hae In
Kang, Ji Eun
Choi, Seung Yup
Kim, Ki Hyun
Kim, Doo San https://orcid.org/0000-0002-5598-1358
Ellingboe, A R
Kim, Hye Min
Yeom, Geun Young https://orcid.org/0000-0002-1176-7448
Kim, Dong Woo
Article Title: Plasma enhanced atomic layer deposition of silicon nitride using magnetized very high frequency plasma
Journal Title: Nanotechnology
Article Type: paper
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Publication dates
Date Received: 2023-11-16
Date Accepted: 2024-03-24
Online publication date: 2024-04-18