Yan, Chi https://orcid.org/0009-0008-8469-6629
Tong, Hua https://orcid.org/0000-0003-0970-703X
Liu, Cui
Ye, Xiaojun
Yuan, Xiao
Xu, Jiahui
Li, Hongbo
Funding for this research was provided by:
Science and Technology Innovation Plan Of Shanghai Science and Technology Commission (Grant No. 21DZ1205700)
Article Title: Activation of polyimide by oxygen plasma for atomic layer deposition of highly compact titanium oxide coating
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-07-11
Date Accepted: 2024-03-24
Online publication date: 2024-04-09