Coffineau, Dorian https://orcid.org/0009-0004-4953-4078
Gariépy, Nicolas
Manchon, Benoit
Dawant, Raphaël https://orcid.org/0000-0001-9115-0052
Jaouad, Abdelatif
Grondin, Etienne
Ecoffey, Serge
Alibart, Fabien
Beilliard, Yann https://orcid.org/0000-0003-0311-8840
Ruediger, Andreas
Drouin, Dominique
Funding for this research was provided by:
Fonds de recherche du Québec - Nature et technologies
Canada First Research Excellence Fund
Natural Sciences and Engineering Research Council of Canada (HIDATA project 506289-2017)
CHIST-ERA
Article Title: CMOS-compatible Hf0.5Zr0.5O2-based ferroelectric memory crosspoints fabricated with damascene process
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-07-20
Date Accepted: 2024-07-17
Online publication date: 2024-07-29