Wauschkuhn, Nils https://orcid.org/0000-0001-6187-3786
Kayser, Yves https://orcid.org/0000-0002-0301-2918
Baumann, Jonas https://orcid.org/0000-0002-1085-9527
Degenhardt, Johannes https://orcid.org/0000-0001-5508-5556
Siefke, Thomas https://orcid.org/0000-0001-6876-4080
Truong, Vinh-Binh
Soltwisch, Victor https://orcid.org/0000-0001-8469-8589
Beckhoff, Burkhard
Hönicke, Philipp https://orcid.org/0000-0002-0712-903X
Funding for this research was provided by:
14ACMOS (101096772)
Electronic Components and Systems for European Leadership (875999)
Article Title: Characterization and discrimination of periodic nanostructures with scanning-free GEXRF
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-11-28
Date Accepted: 2025-05-14
Online publication date: 2025-05-22