Fan, Yingjie
Wang, Ya
Huang, Haiteng
Zhang, Jingjing
Yu, Lihui
Guo, Jingquan
Zhao, Qiutong
Zhang, Yiling
Chen, Zhuzhuoyue
Ye, Shujun https://orcid.org/0000-0002-4621-8887
Funding for this research was provided by:
National Natural Science Foundation of China (62274012)
National Youth Talents Program of China
Article Title: Controllable formation of HfO2 thin film in 20 nm thick lateral trenches with high aspect ratio up to 30
Journal Title: Nanotechnology
Article Type: paper
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Publication dates
Date Received: 2025-04-12
Date Accepted: 2025-07-23
Online publication date: 2025-08-04