Park, Seolhye https://orcid.org/0000-0002-5957-1532
Seong, Jaegu https://orcid.org/0000-0002-3926-0534
Park, Yoona
Noh, Yeongil
Lee, Haneul https://orcid.org/0000-0001-7097-5522
Bae, Namjae
Roh, Ki-Baek
Seo, Rabul
Song, Bongsub
Kim, Gon-Ho
Article Title: Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
Journal Title: Plasma Physics and Controlled Fusion
Article Type: paper
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Publication dates
Date Received: 2023-08-31
Date Accepted: 2024-01-04
Online publication date: 2024-01-16