Trieschmann, Jan
Mussenbrock, Thomas
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (Sonderforschungsbereich TRR 87)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Kinetic analysis of negative power deposition in inductive low pressure plasmas
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-07
Date accepted: 2016-12-06
Online publication date: 2017-01-13