Funding for this research was provided by:
National Research Foundation of Korea (2015M3A9E2066986 and 2016K1A4A4A019, BK21+ program, 2015R1D1A1A01061556)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-07-29
Date accepted: 2016-12-08
Online publication date: 2017-02-10