Funding for this research was provided by:
European Union Sev??enth Framework Programme (316216)
Deutsche Forschungsgemeinschaft (SFB-TRR24)
Article Title: Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2017 IOP Publishing Ltd
Publication dates
Date Received: 2016-08-12
Date Accepted: 2017-01-30
Online publication date: 2017-03-02