Klein, P
Hnilica, J
Hubička, Z
Čada, M
Šlapanská, M
Zemánek, M
Vašina, P
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Cathode voltage and discharge current oscillations in HiPIMS
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-03-22
Date accepted: 2017-02-24
Online publication date: 2017-04-04