Nunomura, Shota
Katayama, Hirotaka
Yoshida, Isao
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Hydrogen atom kinetics in capacitively coupled plasmas
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-18
Date accepted: 2017-03-10
Online publication date: 2017-04-06