Oehrlein, Gottlieb S https://orcid.org/0000-0002-6693-4274
Hamaguchi, Satoshi https://orcid.org/0000-0001-6580-8797
Article Title: Foundations of low-temperature plasma enhanced materials synthesis and etching
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2017-02-28
Date Accepted: 2018-01-17
Online publication date: 2018-02-12