Schmidt, Frederik https://orcid.org/0000-0001-6623-0464
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Johnson, Erik
Booth, Jean-Paul https://orcid.org/0000-0002-0980-3278
Keil, Douglas
French, David M https://orcid.org/0000-0002-2752-6032
Trieschmann, Jan https://orcid.org/0000-0001-9136-8019
Mussenbrock, Thomas https://orcid.org/0000-0001-6445-4990
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (SFB 1316)
Deutsche Forschungsgemeinschaft (SFB TR 87)
Lam Research Corporation
US National Science Foundation (PHY 1601080)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Multi frequency matching for voltage waveform tailoring
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-04-27
Date accepted: 2018-07-11
Online publication date: 2018-09-25