Kozák, Tomáš https://orcid.org/0000-0002-5046-7253
Lazar, Jan
Funding for this research was provided by:
Czech Ministry of Education, Youth and Sports (LO1506)
European structural and investment funds (CZ.02.1.01/0.0/0.0/17_048/0007267)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Gas rarefaction in high power impulse magnetron sputtering: comparison of a particle simulation and volume-averaged models
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-05-25
Date accepted: 2018-10-26
Online publication date: 2018-11-22