Kim, D W https://orcid.org/0000-0001-6534-3416
You, S J
Kim, S J https://orcid.org/0000-0001-7782-7194
Kim, J H
Lee, J Y
Kang, W S https://orcid.org/0000-0003-0047-4997
Funding for this research was provided by:
Korea Institute of Machinery and Materials (Development of Smart Design Platform for Machine a)
Korea Research Institute of Standards and Science
Article Title: Planar cutoff probe for measuring the electron density of low-pressure plasmas
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-07-22
Date Accepted: 2018-11-21
Online publication date: 2019-01-17