Toneli, D A https://orcid.org/0000-0002-4833-3096
Pessoa, R S https://orcid.org/0000-0001-7600-9747
Roberto, M https://orcid.org/0000-0002-0709-7496
Gudmundsson, J T https://orcid.org/0000-0002-8153-3209
Funding for this research was provided by:
VINNOVA (2014-04876)
Conselho Nacional de Desenvolvimento Científico e Tecnológico (301982/2015-5)
Conselho Nacional de Desenvolvimento Científico e Tecnológico (446905/2014-3)
Fundação de Amparo à Pesquisa do Estado de São Paulo (18/01265-1)
Fundação de Amparo à Pesquisa do Estado de São Paulo (2015/16471-8)
Icelandic Centre for Research (130029)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: A global model study of low pressure high density CF4 discharge
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-09-25
Date accepted: 2018-11-26
Online publication date: 2019-02-25