Versolato, Oscar O https://orcid.org/0000-0003-3852-5227
Funding for this research was provided by:
Stichting voor de Technische Wetenschappen (VIDI/15697)
ERC: European Research Council (Starting Grant/802648)
Article Title: Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd
Publication dates
Date Received: 2018-06-22
Date Accepted: 2019-07-17
Online publication date: 2019-08-19