Oberberg, M http://orcid.org/0000-0002-8170-0628
Engel, D
Berger, B http://orcid.org/0000-0001-7053-2545
Wölfel, C
Eremin, D
Lunze, J
Brinkmann, R P http://orcid.org/0000-0002-2581-9894
Awakowicz, P
Schulze, J http://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (417888799)
Article Title: Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd
Publication dates
Date Received: 2019-06-04
Date Accepted: 2019-11-01
Online publication date: 2019-11-27