Zuo, Xiao https://orcid.org/0000-0002-3215-208X
Zhang, Dong
Chen, Rende
Ke, Peiling
Odén, Magnus
Wang, Aiying https://orcid.org/0000-0003-2938-5437
Funding for this research was provided by:
Ningbo Science and Technology Innovation Project (2018B10014)
National Science and Technology Major Project (2017-VII-0012-0108)
National Natural Science Foundation of China (11705258)
Article Title: Spectroscopic investigation on the near-substrate plasma characteristics of chromium HiPIMS in low density discharge mode
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2019-08-16
Date Accepted: 2019-11-26
Online publication date: 2020-01-28