Yeom, H J
Kim, J H
Choi, D H
Choi, E S
Yoon, M Y
Seong, D J
You, Shin Jae https://orcid.org/0000-0002-8306-7643
Lee, Hyo-Chang https://orcid.org/0000-0003-2754-1512
Funding for this research was provided by:
Korea Research Institute of Standard and Science (KRISS 19011085)
R&D Convergence Program (1711062007)
Article Title: Flat cutoff probe for real-time electron density measurement in industrial plasma processing
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2019-09-09
Date Accepted: 2019-12-17
Online publication date: 2020-03-05