Bernátová, K https://orcid.org/0000-0002-4039-0061
Fekete, M https://orcid.org/0000-0002-8165-633X
Klein, P https://orcid.org/0000-0002-4995-3756
Hnilica, J https://orcid.org/0000-0002-5021-2664
Vašina, P
Funding for this research was provided by:
Grantová Agentura České Republiky (GA19-00579S)
Ministry of Education, Youth and Sports of the Czech Republic (LM2018097)
Technology Agency of the Czech Republic (TJ01000157)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-01-29
Date accepted: 2020-03-24
Online publication date: 2020-05-25