Bernátová, K https://orcid.org/0000-0002-4039-0061
Fekete, M https://orcid.org/0000-0002-8165-633X
Klein, P https://orcid.org/0000-0002-4995-3756
Hnilica, J https://orcid.org/0000-0002-5021-2664
Vašina, P
Funding for this research was provided by:
Grantová Agentura České Republiky (GA19-00579S)
Ministry of Education, Youth and Sports of the Czech Republic (LM2018097)
Technology Agency of the Czech Republic (TJ01000157)
Article Title: Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-01-29
Date Accepted: 2020-03-24
Online publication date: 2020-05-25