Vass, Máté http://orcid.org/0000-0001-9865-4982
Wilczek, Sebastian http://orcid.org/0000-0003-0583-4613
Lafleur, Trevor http://orcid.org/0000-0002-9926-2187
Brinkmann, Ralf Peter http://orcid.org/0000-0002-2581-9894
Donkó, Zoltán http://orcid.org/0000-0003-1369-6150
Schulze, Julian http://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (No. 428942393 SFB TR 87 C1)
Nemzeti Kutatási Fejlesztési és Innovációs Hivatal (119357)
Article Title: Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-04-20
Date Accepted: 2020-06-29
Online publication date: 2020-08-18