Funding for this research was provided by:
US Department of Energy (DE-SC0020232)
Lam Research Inc.
Samsung Electronics Co. Ltd
Article Title: Transients using low-high pulsed power in inductively coupled plasmas
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-03-04
Date Accepted: 2020-06-29
Online publication date: 2020-08-11