Tonneau, R https://orcid.org/0000-0002-3246-8420
Pflug, A
Funding for this research was provided by:
European Commission (VICIA - IGF 199 EN)
Service Public de Wallonie (1117545)
Article Title: Magnetron sputtering: determining scaling relations towards real power discharges using 3D particle-in-cell Monte Carlo models
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2020-02-17
Date Accepted: 2020-08-28
Online publication date: 2020-11-11