Zheng, Bocong https://orcid.org/0000-0002-6052-3693
Fu, Yangyang https://orcid.org/0000-0001-9593-3177
Wang, Keliang
Schuelke, Thomas https://orcid.org/0000-0001-7531-4600
Fan, Qi Hua https://orcid.org/0000-0002-8612-1326
Funding for this research was provided by:
National Science Foundation (1917577 1700787 1724941)
Article Title: Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-12-22
Date Accepted: 2021-02-25
Online publication date: 2021-04-01