Funding for this research was provided by:
Material Innovation program (2020M3H4A3106004)
R&D Convergence Program (CAP-17–02-NFRI-01)
Article Title: Circuit model for flat cut-off probes with coplanar capacitance
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-10-05
Date Accepted: 2021-03-16
Online publication date: 2021-06-16