Wang, Li https://orcid.org/0000-0002-3106-2779
Hartmann, Peter https://orcid.org/0000-0003-3572-1310
Donkó, Zoltán https://orcid.org/0000-0003-1369-6150
Song, Yuan-Hong https://orcid.org/0000-0001-5712-9241
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
National Natural Science Foundation of China (11975067 12020101005)
Nemzeti Kutatási Fejlesztési és Innovációs Hivatal (134462)
Deutsche Forschungsgemeinschaft (No. 428942393 SFB-TR 87 (project C1))
China Scholarship Council (201906060024)
Article Title: 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-10-31
Date Accepted: 2021-03-25
Online publication date: 2021-08-27