El Farsy, A https://orcid.org/0000-0002-8285-8451
Boivin, D
Noel, C
Hugon, R
Cuynet, S
Bougdira, J
de Poucques, L
Article Title: Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-05-02
Date Accepted: 2021-05-18
Online publication date: 2021-06-17