Wang, Jun-Chieh
Tian, Peng https://orcid.org/0000-0001-5042-6219
Kenney, Jason
Rauf, Shahid https://orcid.org/0000-0001-5689-6115
Korolov, Ihor https://orcid.org/0000-0003-2384-1243
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Article Title: Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2021-02-28
Date Accepted: 2021-06-22
Online publication date: 2021-07-29