Han, Mingyue
Luo, Yang
Li, Liuhe https://orcid.org/0000-0002-6339-9835
Gu, Jiabin https://orcid.org/0000-0002-5462-3401
Xu, Ye
Luo, Sida
Funding for this research was provided by:
National Science and Technology Major Project (2017-VII-0003-0096)
Article Title: Optimizing the ion diffusion in bipolar-pulse HiPIMS discharge (BP-HiPIMS) via an auxiliary anode
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-06-16
Date Accepted: 2021-07-12
Online publication date: 2021-09-17