Ono, Toshisato
Kortshagen, Uwe R https://orcid.org/0000-0001-5944-3656
Hogan, Christopher J Jr https://orcid.org/0000-0001-7655-4980
Funding for this research was provided by:
CCP
Army Research Office (W911NF-18-1-0240)
Article Title: Material-dependent submicrometer particle trapping in capacitively-coupled plasma sheaths in an intermediate collision regime
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-05-29
Date Accepted: 2021-08-16
Online publication date: 2021-09-14