Schulenberg, David A https://orcid.org/0000-0002-4086-8678
Korolov, Ihor https://orcid.org/0000-0003-2384-1243
Donkó, Zoltán https://orcid.org/0000-0003-1369-6150
Derzsi, Aranka https://orcid.org/0000-0002-8005-5348
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
German Research Foundation (SFB-TR 87)
National Natural Science Foundation of China (12020101005)
NKFIH (134462)
Article Title: Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-04-29
Date Accepted: 2021-08-27
Online publication date: 2021-09-30