Cao, Zhiyuan http://orcid.org/0000-0001-6314-2397
Li, Rui
Wang, Zhenxing http://orcid.org/0000-0001-5083-0975
Cao, Bo
Zhou, Zhipeng http://orcid.org/0000-0002-2594-9445
Sun, Liqiong http://orcid.org/0000-0003-0220-0113
Geng, Yingsan
Wang, Jianhua
Funding for this research was provided by:
National Natural Science Foundation of China (51807147)
Article Title: Three-dimensional hybrid plasma modeling of anodic sputtering in vacuum arcs
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-06-06
Date Accepted: 2021-09-28
Online publication date: 2021-10-25