Yang, Dong https://orcid.org/0000-0002-8892-7817
Fu, Yangyang https://orcid.org/0000-0001-9593-3177
Zheng, Bocong https://orcid.org/0000-0002-6052-3693
Wang, Huihui https://orcid.org/0000-0002-4052-1287
Fan, Qi Hua https://orcid.org/0000-0002-8612-1326
Zou, Xiaobing https://orcid.org/0000-0001-6055-8442
Wang, Xinxin https://orcid.org/0000-0003-3564-6816
Verboncoeur, John P https://orcid.org/0000-0002-7078-3544
Funding for this research was provided by:
State Key Laboratory of Power System and Generation Equipment (SKLD21M06)
Article Title: Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-08-24
Date Accepted: 2021-10-12
Online publication date: 2021-11-11