Dong, Wan http://orcid.org/0000-0003-1164-6707
Zhang, Yi-Fan
Dai, Zhong-Ling
Schulze, Julian http://orcid.org/0000-0001-7929-5734
Song, Yuan-Hong http://orcid.org/0000-0001-5712-9241
Wang, You-Nian http://orcid.org/0000-0002-6506-7148
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (428942393)
National Natural Science Foundation of China (11975067)
Article Title: Hybrid simulation of instabilities in capacitively coupled RF CF4/Ar plasmas
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-09-13
Date Accepted: 2022-01-04
Online publication date: 2022-02-11