Dvořák, P https://orcid.org/0000-0003-0282-0267
Žemlička, R
Přibyl, R https://orcid.org/0000-0003-4342-4121
Buršíková, V https://orcid.org/0000-0001-5505-6632
Funding for this research was provided by:
Grantová Agentura České Republiky (19-15240S)
Ministerstvo Školství, Mládeže a Tělovýchovy (LM2018097)
Article Title: Electric signals measured during plasma thin-film etching and their connection to the electron concentration and the properties of the treated surface
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-06-30
Date Accepted: 2022-01-24
Online publication date: 2022-03-29