Funding for this research was provided by:
National Research Foundation of Korea (NRF2019M1A7A1A03087579)
Ministry of Trade, Industry and Energy (20009415)
Article Title: Measurement of the electron energy distribution functions in low density RF plasmas through a tunable external RF filter
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-10-05
Date Accepted: 2022-03-28
Online publication date: 2022-04-21