Jiménez-Redondo, Miguel https://orcid.org/0000-0001-9221-8426
Tanarro, Isabel https://orcid.org/0000-0002-1888-513X
Herrero, Víctor J https://orcid.org/0000-0002-7456-4832
Funding for this research was provided by:
Ministerio de Ciencia e Innovación (PID2020-113084GB-100)
European Commission (ERC-2013-Syg-210656-NANOCOSMOS)
Ministerio de Economía y Competitividad (FIS2016-77726-C3.1.P)
Article Title: Time evolution of neutral and charged species in Ar/C 2 H 2 capacitively-coupled RF discharges
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-03-08
Date Accepted: 2022-05-18
Online publication date: 2022-06-09