Derzsi, A https://orcid.org/0000-0002-8005-5348
Hartmann, P https://orcid.org/0000-0003-3572-1310
Vass, M https://orcid.org/0000-0001-9865-4982
Horváth, B https://orcid.org/0000-0002-2371-2444
Gyulai, M
Korolov, I https://orcid.org/0000-0003-2384-1243
Schulze, J https://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
Hungarian National Research, Development and Innovation Office (FK-128924)
German Research Foundation (Electron heating in capacitive RF plasmas based on)
Article Title: Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2022-04-28
Date Accepted: 2022-06-22
Online publication date: 2022-09-14