Gudmundsson, Jon Tomas https://orcid.org/0000-0002-8153-3209
Anders, André https://orcid.org/0000-0002-5313-6505
von Keudell, Achim https://orcid.org/0000-0003-3887-9359
Funding for this research was provided by:
Leibniz Association via the Collaborative Excellence Project (K128/2018)
German Science Foundation (SFB TR 87)
Icelandic Research Fund (196141)
Article Title: Foundations of physical vapor deposition with plasma assistance
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-05-29
Date Accepted: 2022-07-07
Online publication date: 2022-09-19