Zhang, Tianliang https://orcid.org/0000-0002-9695-8285
Cui, Ruilin https://orcid.org/0000-0002-1486-2854
Han, Ruoyu https://orcid.org/0000-0002-9302-6853
He, Feng https://orcid.org/0000-0002-2847-2355
Zhu, Wanying
Xia, Zhangyu
Cui, Ying
Ouyang, Jiting https://orcid.org/0000-0002-5585-3719
Funding for this research was provided by:
National Natural Science Foundation of China (11975047)
Article Title: Nitrogen discharge characteristics and species kinetics in helicon plasma source
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-06-28
Date Accepted: 2022-09-28
Online publication date: 2022-10-19