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A computationally assisted technique to measure material-specific surface coefficients in capacitively coupled plasmas based on characteristics of the ion flux-energy distribution function

Crossref DOI link: https://doi.org/10.1088/1361-6595/ac95c2

Published Online: 2022-10-28

Published Print: 2022-10-01

Update policy: https://doi.org/10.1088/crossmark-policy

Authors

Schulze, C https://orcid.org/0000-0002-9636-2270
Donkó, Z https://orcid.org/0000-0003-1369-6150
Benedikt, J https://orcid.org/0000-0002-8954-1908
Funding

Funding for this research was provided by:

Deutsche Forschungsgemeinschaft (426208229)

Nemzeti Kutatási Fejlesztési és Innovációs Hivatal (K134462)
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Article Title: A computationally assisted technique to measure material-specific surface coefficients in capacitively coupled plasmas based on characteristics of the ion flux-energy distribution function

Journal Title: Plasma Sources Science and Technology

Article Type: paper

Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd

Publication dates

Date Received: 2022-04-27

Date Accepted: 2022-09-28

Online publication date: 2022-10-28

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