Yang, Dong https://orcid.org/0000-0002-8892-7817
Wang, Huihui https://orcid.org/0000-0002-4052-1287
Zheng, Bocong https://orcid.org/0000-0002-6052-3693
Zou, Xiaobing https://orcid.org/0000-0001-6055-8442
Wang, Xinxin https://orcid.org/0000-0003-3564-6816
Fu, Yangyang https://orcid.org/0000-0001-9593-3177
Funding for this research was provided by:
State Key Laboratory of Power System and Generation Equipment (SKLD21M06)
Tsinghua University Initiative Scientific Research Program
Article Title: Application of similarity laws to dual-frequency capacitively coupled radio frequency plasmas with the electrical asymmetry effect
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-06-01
Date Accepted: 2022-10-14
Online publication date: 2022-11-03