Lieberman, M A https://orcid.org/0000-0002-2841-2870
Kawamura, E https://orcid.org/0000-0003-2176-7377
Chabert, P https://orcid.org/0000-0002-6211-4746
Funding for this research was provided by:
Applied Materials Corporation, AKT Display Group
Article Title: Standing wave instability in large area capacitive discharges operated within or near the gamma mode
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-07-13
Date Accepted: 2022-11-08
Online publication date: 2022-11-21