Jeong, Seokyong https://orcid.org/0000-0002-4311-1195
Nam, Woojin https://orcid.org/0000-0002-2124-4122
Shim, Seungbo
Yun, Gunsu https://orcid.org/0000-0002-1880-5865
Funding for this research was provided by:
BK 21+ Progrem
Samsung Electronics Co., Ltd (IO201209-07922-01)
National Research Foundation of Korea (2019R1A2C3011474)
Institute of Information & Communications Technology Planning & Evaluation (2019-0-01906)
Article Title: Investigation of the afterpeaks in pulsed microwave argon plasma at atmospheric pressure
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2021-04-29
Date Accepted: 2022-12-13
Online publication date: 2023-01-11