Rauf, Shahid https://orcid.org/0000-0001-5689-6115
Schroeder, Manuel https://orcid.org/0000-0001-7957-3888
Korolov, Ihor https://orcid.org/0000-0003-2384-1243
Kenney, Jason https://orcid.org/0000-0001-8813-1213
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Article Title: Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2023 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-11-03
Date Accepted: 2023-03-03
Online publication date: 2023-03-20